O le gaosiga o le 6N (≥99.9999% mama) ultra-high-purity sulfur e manaʻomia ai le tele-laasaga distillation, loloto adsorption, ma ultra-mama filtration e faʻateʻa ai uʻamea suʻesuʻe, eleelea oona, ma vaega. O lo'o i lalo se fa'agasologa fa'apisinisi fa'atasi ai le fa'amama fa'amama, fa'amamāina fesoasoani i le microwave, ma fa'atekonolosi sa'o pe a mae'a togafitiga.
I. Fa'ameamea Mu'ai Togafitiga ma le Ave'esea o le le mama
1. Filifiliga o Mea Matagofie ma Mu'ai Togafitiga
- ?Manaoga : Muamua sulfur mama ≥99.9% (3N vasega), u'amea leaga uma ≤500 ppm, organic carbon anotusi ≤0.1%.
- ?Fa'aliusuavai Fesoasoani ile Microwave:
O lo'o fa'agaioia le sulfur ma'ale'ale i totonu ole masini microwave (2.45 GHz frequency, 10–15 kW power) ile 140–150°C. O le taamilosaga o le dipole e fa'aosoina i le microwave e fa'amautinoa ai le vave liusuavai a'o fa'apalaina mea leaga fa'alenatura (fa'ata'ita'iga, tar compound). Taimi liusuavai: 30–45 minute; le loloto o le ulu o microwave: 10–15 cm - ?Fufulu Vai Fa'a'ona:
O lo'o fa'afefiloi le sulfur liusuavai ma le vai fa'asao (resistivity ≥18 MΩ·cm) i le 1:0.3 fua fa'atasi i totonu o se fa'aoso fa'aoso (120°C, 2 pa mamafa) mo le 1 itula e aveese ai masima solu vai (eg, ammonium sulfate, sodium chloride). O le vaega aqueous ua decanted ma toe faʻaaogaina mo le 2-3 taamilosaga seia oʻo i le conductivity ≤5 μS/cm.
2. Feso'ota'iga Fa'atele ma Fa'amama
- ?Diatomaceous Earth/Activated Carbon Adsorption:
O le eleele diatomaceous (0.5–1%) ma le kaponi fa'agaoioi (0.2-0.5%) o lo'o fa'aopoopoina i le sulfur liusuavai i lalo o le puipuiga o le nitrogen (130°C, 2-itula fa'aoso) e fa'afefeteina ai mea fa'apipi'i u'amea ma meaola fa'aala. - ?Ultra-Precision Filtration:
Filifiliga lua-laasaga e faʻaaoga ai le titanium sintered filters (0.1 μm pore size) ile ≤0.5 MPa faʻamalosi tino. Numera matā'ele'ele pe a mae'a fa'amama: ≤10 fasimea/L (tele>0.5 μm).
II. Fa'agasologa Fa'amama'i'i Vacuum Fa'asologa e tele
1. Fa'amamaga Tulaga Muamua (Ave'ese le Fa'ameamea)
- ?Meafaigaluega : High-mama quartz distillation koluma ma 316L stainless steel fausaga fausaga (≥15 theoretical plates), vacuum ≤1 kPa .
- ?Faiga Fa'atino:
- ?Fafaga Vevela : 250–280°C (pupuna le sulfur i le 444.6°C i lalo o le mamafa o le ambient; o le gaogao e faaitiitia ai le vevela i le 260–300°C).
- ?Fuafuaga Reflux: 5:1–8:1; koluma pito i luga ole vevela fesuiaiga ≤±0.5°C.
- ?Oloa : Condensed sulfur mama ≥99.99% (4N grade), aofaʻi uʻamea leaga (Fe, Cu, Ni) ≤1 ppm.
2. Fa'ali'i Molecular Lua (Ave'esea Oona Fa'aleaga).
- ?Meafaigaluega : Puupuu auala mole distiller ma 10-20 mm evaporation-condensation va, vevela vevela 300-320 °C, vacuum ≤0.1 Pa.
- ?Tuueseese Le mama:
O mea fa'apalapala maualalo (fa'ata'ita'iga, thioethers, thiophene) e ausa ma aveese, a'o mea leaga e fa'apuna maualuga (fa'ata'ita'iga, polyaromatics) o lo'o tumau pea i toega ona o le eseesega i le auala saoloto mole. - ?Oloa : Sulfur mama ≥99.999% (5N grade), organic carbon ≤0.001%, fua faatatau totoe <0.3%.
3. Fa'amama Sone Tulaga Maualuga (Ausia 6N Mama).
- ?Meafaigaluega : Fa'amama sone fa'asaga i le tele o sone e pulea le vevela (±0.1°C), sone saosaoa femalagaa'i 1–3 mm/h.
- ?Vaevaega:
Fa'aaogāina fa'avaevaega (K=Csolid/CliquidK=Cmautu/CSuavai), 20-30 sone pasi u'amea concentrate (As, Sb) i le pito ingot. O le 10-15% mulimuli o le sulfur ingot ua lafoai.
III. Fa'ata'ita'i Togafitiga ma Fa'amama Fa'amama
1. Ave'esega Solvent Ultra-Mama
- ?Eteru/Carbon Tetrachloride Extraction:
Ua fa'afefiloi le Sulfur ma le chromatographic-grade ether (1:0.5 volume ratio) i lalo ole fesoasoani ultrasonic (40 kHz, 40°C) mo le 30 minute e aveese ai su'ega polar organics. - ?Toe fa'aleleia o Solvent:
Molecular sieve adsorption ma vacuum distillation faaitiitia toega solvent i ≤0.1 ppm.
2. Ultrafiltration ma Ion Exchange
- ?PTFE Membrane Ultrafiltration:
O lo'o fa'amama le sulfur liusuavai ile 0.02 μm PTFE membranes ile 160-180°C ma le ≤0.2 MPa mamafa. - ?Ion Exchange Resins:
Chelating resins (fa'ata'ita'iga, Amberlite IRC-748) aveese ion u'amea ppb-level (Cu²⁺, Fe³⁺) i le 1-2 BV/h fua faatatau tafe.
3. Ole Si'osi'omaga mama-Mama Fa'atupu
- ?Atomization Kasa Inert:
I totonu o le Vasega 10 potu mama, o lo'o fa'afefeteina le sulfur liusuavai i le nitrogen (0.8-1.2 MPa pressure) i 0.5-1 mm spherical granules (susū <0.001%). - ?Vacuum Packaging:
O oloa mulimuli o loʻo faʻamaufaʻailogaina i le alumini faʻapipiʻi ata tifaga i lalo ole argon ultra-mama (≥99.9999% mama) e puipuia ai le faʻamaʻiina.
IV. Parameter Fa'agasologa Taua
Tulaga Fa'agasologa | Vevela (°C). | Omiga | Taimi/Saosaoa | Meafaigaluega Autu |
Maliu Microwave | 140–150 | Ambient | 30–45 min | Fa'a'ave'ave'ave'ave'amu |
Fufulu Vai Fa'a'ona | 120 | 2 pa | 1 itula/taamilosaga | Stirred Reactor |
Molecular Distillation | 300–320 | ≤0.1 Pa | Fa'aauau | Puupuu-Ala Molecular Distiller |
Fa'amama sone | 115–120 | Ambient | 1–3 mm/h | Sone Fa'asaga'i Fa'ata'amilo |
PTFE Ultrafiltration | 160–180 | ≤0.2 MPa | 1–2 m³/h tafe | Filifiliga maualuga-Sua |
Atomization o le Nitrogen | 160–180 | 0.8–1.2 MPa | 0.5-1 mm granules | Atomization Olo |
V. Puleaina lelei ma Su'ega
- ?Su'e Su'esu'ega Le mama:
- ?GD-MS (Glow Discharge Mass Spectrometry): Su'e metala ile ≤0.01 ppb.
- ?TOC su'esu'e: Fua le kaponi fa'aola ≤0.001 ppm .
- ?Pulea le Lapopo'a:
Laser diffraction (Mastersizer 3000) mautinoa D50 deviation ≤±0.05 mm. - ?Fa'amama i luga:
XPS (X-ray Photoelectron Spectroscopy) fa'amaonia le mafiafia o le oxide ≤1 nm .
VI. Saogalemu ma le Siosiomaga Design
- ?Puipuiga o Pa:
O fa'ama'i afi mumu ma faiga lologa o le nitrogen e fa'atumauina le maualuga o le okesene <3% - ?Pulea le fa'asa:
- ?Kasa Aasa : Lua-laasaga NaOH fufulu (20% + 10%) aveese ≥99.9% H₂S/SO₂.
- ?VOC : Zeolite rotor + RTO (850°C) fa'aiti'itia hydrocarbons le methane i le ≤10 mg/m³ .
- ?Toe fa'aaogaina o otaota:
Faʻaitiitia le vevela maualuga (1200 ° C) toe faʻaleleia metala; mea o totoe o le sulfur <0.1% .
VII. Fuafuaga Fa'atekonolosi
- ?Fa'aaogāina Malosiaga: 800–1200 kWh eletise ma 2–3 tone ausa ile tone ole 6N sulfur.
- ?Tuuina atu : Toe faʻaleleia o le sulfur ≥85%, fua o totoe <1.5%.
- ?Tau: Tau o gaosiga ~ 120,000–180,000 CNY/ton; tau maketi 250,000–350,000 CNY/ton (vasega semiconductor) .
O lenei faiga e maua ai le 6N sulfur mo semiconductor photoresists, III-V faʻapipiʻi substrates, ma isi faʻaoga maualuga. Mata'ituina taimi moni (fa'ata'ita'iga, su'esu'ega elemene a le LIBS) ma le ISO Vasega 1 o le fa'avasegaina o potu mama e fa'amautinoa ai le lelei.
vaefaamatalaga
- Fa'amatalaga 2: Alamanuia Sulfur Fa'amamaina Tulaga Fa'amama
- Fa'asinomaga 3: Fa'ata'ita'iga Fa'amama Fa'asili ile Inisinia Kemisi
- Fa'asinomaga 6: Tusitaulima Fa'agaioiina Mea e Mamalu Maualuga
- Fa'asinomaga 8: Semiconductor-Grade Chemical Production Protocols
- Fa'asinomaga 5: Fa'amama fa'amama le fa'ameamea
Taimi meli: Apr-02-2025